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Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR
Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR
GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
SPECIFICATIONS
OPTIONAL ACCESSORY
$64,998.00
Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR—
$64,998.00
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Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR
GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
SPECIFICATIONS
OPTIONAL ACCESSORY
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Product Information
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Description
GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
SPECIFICATIONS
OPTIONAL ACCESSORY




























