RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC

VTC-2RF-C is an RF magnetron sputtering gun that is inserted into a rotating and rocking 7" quartz tube for coating various materials, including conductive and insulative, around the surface of powder.

SPECIFICATIONS

Power	220 VAC 50/60Hz, single phase. 1400W 110 V power is available via a 2000 W transformer (optional)
RF Megnetron Power Supply	Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Matching: Automatic with variable air capacitor Cooling: Air cooling Noise: <50 dB Power: 110 -240VAC, 50/60Hz Dimension: 400 W x 450 D x 80 H, mm
Sputtering Gun and target	Made of high-quality materials of stainless steel and ceramics. Electromagnetic finite element calculations are used to design the permanent magnetic assembly to achieve high field strength and a uniform field profile. The magnet is coated with protective material against cooling water corrosion to maximize durability. Standard RF connector, which matches a wide range of DC and RF sputtering power supplies. Easy to install a standard fitting with an included quick connector 2" Copper Backing Plate (EQ-CBP-2) is included. Target replacement is easy, and no need to 2"Dia x 0.25" thickness target may be available upon request at an extra cost
Quartz Tube and Flanges	Special quartz tube, OD 180 mm in the center and OD 130 mm at both ends, and a length of 700 mm 4 blades are welded inside the center tube for stirring powder during roating The quartz tube is mounted on a metal case, which can be rotated and rocked Rotating speed: 1- 10 RPM Rocking angle: +/- 4 deg. 2" RF sputtering gun is inserted into the tube via an air-tight flange from the left with gest-inlet The right side flange is installed with a vacuum gauge, valve, and gas outlet A digital vacuum gauge is includedThe KF25 vacuum port is installed to connect the vacuum pump
Water chiller	16 L/min flow rate recirculating water chiller is included to cool the sputtering gan
Optional	A vacuum pump is required and is optional < 1.0E-2 Torr by Rotary vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets < 1.0E-5 Torr by Turbopump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air) A digital gas delivery system may be required and optional
Compliance	CE approval NRTL (UL 6100) certification is available upon request at an extra cost. Please contact our sales representative for a quote

$8,744.75

Original: $24,985.00

-65%

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC—

$24,985.00

$8,744.75

More Images

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC - Image 2

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC - Image 3

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC - Image 4

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC - Image 5

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC - Image 6

RF Magnetron Sputtering Powder Coater inside Rotary and Rocking Quartz Tube Chamber - VTC2RFC

VTC-2RF-C is an RF magnetron sputtering gun that is inserted into a rotating and rocking 7" quartz tube for coating various materials, including conductive and insulative, around the surface of powder.

SPECIFICATIONS

Power	220 VAC 50/60Hz, single phase. 1400W 110 V power is available via a 2000 W transformer (optional)
RF Megnetron Power Supply	Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Matching: Automatic with variable air capacitor Cooling: Air cooling Noise: <50 dB Power: 110 -240VAC, 50/60Hz Dimension: 400 W x 450 D x 80 H, mm
Sputtering Gun and target	Made of high-quality materials of stainless steel and ceramics. Electromagnetic finite element calculations are used to design the permanent magnetic assembly to achieve high field strength and a uniform field profile. The magnet is coated with protective material against cooling water corrosion to maximize durability. Standard RF connector, which matches a wide range of DC and RF sputtering power supplies. Easy to install a standard fitting with an included quick connector 2" Copper Backing Plate (EQ-CBP-2) is included. Target replacement is easy, and no need to 2"Dia x 0.25" thickness target may be available upon request at an extra cost
Quartz Tube and Flanges	Special quartz tube, OD 180 mm in the center and OD 130 mm at both ends, and a length of 700 mm 4 blades are welded inside the center tube for stirring powder during roating The quartz tube is mounted on a metal case, which can be rotated and rocked Rotating speed: 1- 10 RPM Rocking angle: +/- 4 deg. 2" RF sputtering gun is inserted into the tube via an air-tight flange from the left with gest-inlet The right side flange is installed with a vacuum gauge, valve, and gas outlet A digital vacuum gauge is includedThe KF25 vacuum port is installed to connect the vacuum pump
Water chiller	16 L/min flow rate recirculating water chiller is included to cool the sputtering gan
Optional	A vacuum pump is required and is optional < 1.0E-2 Torr by Rotary vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets < 1.0E-5 Torr by Turbopump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air) A digital gas delivery system may be required and optional
Compliance	CE approval NRTL (UL 6100) certification is available upon request at an extra cost. Please contact our sales representative for a quote

Product Information

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Description

VTC-2RF-C is an RF magnetron sputtering gun that is inserted into a rotating and rocking 7" quartz tube for coating various materials, including conductive and insulative, around the surface of powder.

SPECIFICATIONS

Power	220 VAC 50/60Hz, single phase. 1400W 110 V power is available via a 2000 W transformer (optional)
RF Megnetron Power Supply	Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Matching: Automatic with variable air capacitor Cooling: Air cooling Noise: <50 dB Power: 110 -240VAC, 50/60Hz Dimension: 400 W x 450 D x 80 H, mm
Sputtering Gun and target	Made of high-quality materials of stainless steel and ceramics. Electromagnetic finite element calculations are used to design the permanent magnetic assembly to achieve high field strength and a uniform field profile. The magnet is coated with protective material against cooling water corrosion to maximize durability. Standard RF connector, which matches a wide range of DC and RF sputtering power supplies. Easy to install a standard fitting with an included quick connector 2" Copper Backing Plate (EQ-CBP-2) is included. Target replacement is easy, and no need to 2"Dia x 0.25" thickness target may be available upon request at an extra cost
Quartz Tube and Flanges	Special quartz tube, OD 180 mm in the center and OD 130 mm at both ends, and a length of 700 mm 4 blades are welded inside the center tube for stirring powder during roating The quartz tube is mounted on a metal case, which can be rotated and rocked Rotating speed: 1- 10 RPM Rocking angle: +/- 4 deg. 2" RF sputtering gun is inserted into the tube via an air-tight flange from the left with gest-inlet The right side flange is installed with a vacuum gauge, valve, and gas outlet A digital vacuum gauge is includedThe KF25 vacuum port is installed to connect the vacuum pump
Water chiller	16 L/min flow rate recirculating water chiller is included to cool the sputtering gan
Optional	A vacuum pump is required and is optional < 1.0E-2 Torr by Rotary vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets < 1.0E-5 Torr by Turbopump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air) A digital gas delivery system may be required and optional
Compliance	CE approval NRTL (UL 6100) certification is available upon request at an extra cost. Please contact our sales representative for a quote